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Patents Issused in 2001
The following is a list of the patents awarded to SEH during 2001. Each US patent's title will link to a full text of that patent on the United States Patent and Trademark Office web site.
US
6,171,389 |
Methods of Producing Doped
Semiconductors |
1/9/01 |
Anderson (Douglas) |
US
6,174,349 |
Continuous Effluent Gas Scrubber
System and Method |
1/16/01 |
DeSantis (Nicholas) |
US
6,176,923 |
Crucible with Differentially
Expanding Release Mechanism |
1/23/01 |
Heid |
US
6,179,914 |
Dopant Delivery System and Method |
1/3/01 |
Aydelott |
US
6,183,556 |
Insulating and Warming Shield for
a Seed Crystal and Seed Chuck |
2/6/01 |
Aydelott, Groat |
US
6,183,637 |
Resin Trap Device for Use in
Ultrapure Water Systems and Method of Purifying Water Using Same |
2/6/01 |
Boyce |
US
6,184,154 |
Method of Processing the Backside
of a Wafer Within an Epitaxial Reactor Chamber |
2/6/01 |
Dietze,
Kononchuk |
US
6,186,569 |
Heater Sling |
2/13/01 |
Heid |
US
6,187,091 |
Apparatus and Process for Growing
Silicon Epitaxial Layer |
2/13/01 |
Hamilton |
US
6,189,176 |
High Pressure Gas Cleaning Purge
of a Dry Process Vacuum Pump |
2/20/01 |
Ivey |
US
6,190,453 |
Growth of Epitaxial Semiconductor
Material with Improved Crystallographic Properties |
2/20/01 |
Boydston,
Dietze, Kononchuk
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US
6,197,373 |
Gas Injection Methods for a LPCVD
Furnace |
3/6/01 |
Brown (Pat) |
US
6,199,577 |
Pressure Relief System for
Chemical Storage Tanks |
4/13/01 |
Bomber, Hamilton (Michael) |
US
6,200,202 |
System and Method for Supplying
Slurry to a Semiconductor Processing Machine |
4/13/01 |
Eastman, Wells |
US
6,225,136 |
Method of
Producing a Contaminated Wafer |
5/1/01 |
Tansy,
Lydon |
US
6,228,165 |
Method of
Manufacturing Crystal of Silicon Using an Electric Potential |
5/8/01 |
Kirkland,
Taie |
US
6,246,029 |
High
Temperature Semiconductor Crystal Growing Furnace Component Cleaning
Method |
6/12/01 |
Addis |
US
6,247,737 |
Holding Ring
Tool |
6/19/01 |
Aydelott |
US
6,249,953 |
Method For
Assembling Portions of a Pulling Chamber |
6/26/01 |
Aydelott |
US
6,250,698 |
Purge Tube Ring
Removal Tool |
6/26/01 |
Aydelott |
US
6,254,673 |
Auxiliary
Vacuum Apparatus and Method for Crystal Growth |
7/3/01 |
Johnson
(Aaron), LaBrie, Spradlin |
US
6,254,674 |
Method of
Controllably Delivering Dopant by Limiting the Release Rate of Dopant
From a Submerged Vessel |
7/3/01 |
Aydelott |
US
6,257,961 |
Rotational
Speed Adjustment for Wafer Polishing Method |
7/10/01 |
Suzuki |
US
6,258,177 |
Apparatus for
Cleaning the Grooves of Lapping Plates |
7/10/01 |
Eastman |
US
6,262,855 |
Infrared Laser
Beam Viewing Apparatus |
7/17\01 |
Greisz |
US
6,275,293 |
Method for
Measurement of OSF Density |
8/14/01 |
Brown
(Timothy) |
US
6,284,896 |
Method of
Determining the Thickness of a Layer on a Silicon Substrate |
9/4/01 |
Dietze,
Kononchuk |
US
6,286,685 |
System and
Method for Wafer Thickness Sorting |
9/11/01 |
Kononchuk,
Martin |
US
6,306,197 |
Isopropyl
Alcohol Scrubbing System |
10/23/01 |
Boyce |
US
6,325,983 |
NOX Scrubbing
System and Method |
12/04/01 |
Bomber,
Boyce |
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