SEH America, Inc. | Stock Product Specification

	Product Overview

	Stock Products
	- Polished Wafer - Low Res Substrate - Mechanical Wafer - EPI Wafer - SPV/Lifetime Monitor - P-Particle Monitor - SOI

Mechanical Wafers

Useful for machine setup, wafer-handling tests, etc. requiring mechanical integrity and clean surface conditions. Not recommended for thermal applications requiring device quality bulk or surface defect characteristics.

Description	Definition	Mechanical	Mechanical	Mechanical	Mechanical
Dia		5	6	8	12
Product Code		5M	6M	8M	12M
Type		**	**	**	**
Orient		**	**	**	**
Res		**	**	**	**
Surface Metals		**	**	**	**
Global Flatness	TTV	**	**	**	**
	TIR	**	**	**	**
	FPD	**	**	**	**
Backside		**	**	**	**
Bow
Warp
Site Flatness (20X20) max site	SBIR	**	**	**	**
	SBID	**	**	**	**
	SFLR	**	**	**	**
	SFLD	**	**	**	**
	SFQR	**	**	**	**
	SFQD	**	**	**	**
LPD USL	< 0.12
	<0.13	**	**	**	**
	<0.16	**	**	**	**
	<0.20	**	**	**	**
	<0.30	**	**	**	**
Epi Thickness		**	**	**	**
Epi Res		**	**	**	**
Epi Stacking Faults		**	**	**	**
Laser Mark		**	**	**	**

** Specifications subject to availability