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 P-Particle Monitor
P- <100> wafers with low Crystal Originated Particle densities suitable
for use as process monitors.
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Dia |
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8 |
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Product Code |
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8COP |
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Type |
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p-boron |
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Orient |
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<100> |
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Res |
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0.30 - 30.0 |
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Surface Metals |
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<= 5 E10 |
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Global Flatness |
TTV |
<6.5 |
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TIR |
<4.0 |
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FPD |
<3.0 |
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Backside |
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Etched or WSB |
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Bow |
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Warp |
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Site Flatness (20X20) max site |
SBIR |
<.70 |
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SBID |
<.5 |
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SFLR |
** |
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SFLD |
** |
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SFQR |
<.40 |
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SFQD |
<.30 |
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LPD USL |
< 0.12 |
320 |
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<0.13 |
275 |
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<0.16 |
33 |
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<0.20 |
19 |
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<0.30 |
13 |
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Epi Thickness |
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Epi Res |
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Epi Stacking Faults |
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Laser Mark |
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** |
** Specifications subject to availability
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